Abstract
For a systematic prediction of the radiation-enhanced outdiffusion occurring during implantation, the use of a model based on the effect of vacancy flow on diffusion is described. The model agrees reasonably well with experiments in all twentysix measured cases. For the systematic understanding of the radiation enhanced outdiffusion, an approximative diagram based on the activation energy of self-diffusion is constructed for all pure elements and its application possibilities are discussed.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
A. Anttila, J. Hirvonen: Thin Solid Films33, L 13 (1976)
J. Hirvonen, A. Anttila, M. Hautala: Phys. Lett.66A, 226 (1978)
M. Luomajärvi, J. Keinonen, M. Bister, A. Anttila: Phys. Rev. B, in print
J. Keinonen, M. Hautala, M. Luomajärvi, A. Anttila, M. Bister: Radiat. Eff. (in print)
A. Anttila, M. Bister, A. Fontell, K. B. Winterbon: Radiat. Eff.33, 13 (1977)
K. Wittmaack, P. Blank: Appl. Phys. Lett.31, 21 (1977)
J. Hirvonen, A. Anttila: Scr. Metall.11, 1139 (1977)
M. W. Thompson:Defects and Radiation Damage in Metals (Cambridge University Press, Cambridge 1969)
D. Schumacher: InVacancies and Interstitials in Metals, ed. by A. Seeger, D. Schumacher, W. Schilling and J. Diehl (North Holland, Amsterdam 1970) p. 889
R. C. Weast (ed.):Handbook of Chemistry and Physics, 56th ed. (CRC Press, Cleveland, Ohio 1975/76)
D. E. Gray (ed.):American Institute of Physics Handbook, 3rd ed. (McGraw-Hill, New York 1972)
C. Smithells (ed.):Metals Reference Book, 5th ed. (Butterworth, London 1976)
P. G. Shewmon:Diffusion in Solids (McGraw-Hill, New York 1963) p. 65
J. L. Combasson, B. W. Farmery, D. McCulloch, G. W. Neilson, M. W. Thompson: Radiat. Eff.36, 149 (1978)
D. J. Land, D. G. Simons, J. G. Brennan, M. D. Brown, J. K. Hirvonen, J. P. Biersack: Proc. of International Conference on Ion Beam Modification of Materials, Budapest (1978) p. 35
J. O. McCaldin, H. Sankur: Appl. Phys. Lett.19, 524 (1971)