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Work function and barrier heights of transition metal silicides

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Abstract

The work function of 13 polycrystalline transition metal silicides was measured by photoemission in uhv. Their values are discussed in relationship to their Schottky barrier heights on n-Si. While there appears to be a weak correlation for a certain group of transition metal silicides, the values of the 5d-noble metal silicides including some of the lattice matched Ni silicides appear to be completely uncorrelated. Experimental values of work functions are compared to the values proposed previously by Freeouf.

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Author notes

  1. F. Greuter

    Present address: BBC, Baden, Switzerland

Authors and Affiliations

  1. Universität, Fakultät für Physik, D-7750, Konstanz, Fed. Rep. Germany

    E. Bucher, S. Schulz, M. Ch. Lux-Steiner & P. Munz

  2. Physikalisches Institut, Universität, CH-4000, Basel, Switzerland

    U. Gubler

  3. Laboratorium für Festkörperphysik, ETHZ, CH-8093, Zürich, Switzerland

    F. Greuter

Authors
  1. E. Bucher
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  2. S. Schulz
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  3. M. Ch. Lux-Steiner
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  4. P. Munz
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  5. U. Gubler
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  6. F. Greuter
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Bucher, E., Schulz, S., Lux-Steiner, M.C. et al. Work function and barrier heights of transition metal silicides. Appl. Phys. A 40, 71–77 (1986). https://doi.org/10.1007/BF00616480

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