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High performance a-Si solar cells and new fabrication methods for a-Si solar cells

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Abstract

The super chamber, a separated UHV reaction-chamber system has been developed. A conversion efficiency of 11.7% was obtained for an a-Si solar cell using a high-quality i-layer deposited by the super chamber, and a p-layer fabricated by a photo-CVD method.

As a new material, amorphous superlattice-structure films were fabricated by the photo-CVD method for the first time. Superlattice structure p-layer a-Si solar cells were fabricated, and a conversion efficiency of 10.5% was obtained.

For the fabrication of integrated type a-Si solar cell modules, a laser pattering method was investigated. A thermal analysis of the multilayer structure was done. It was confirmed that selective scribing for a-Si, TCO and metal film is possible by controlling the laser power density. Recently developed a-Si solar power generation systems and a-Si solar cell roofing tiles are also described.

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Authors and Affiliations

  1. Research Center, SANYO Electric Co., Ltd., 1-18-13, Hashiridani, Hirakata City, Osaka, Japan

    S. Nakano & Y. Kuwano

  2. Applied Research Center, SANYO Electric Co., Ltd., 100, Dainichihigashicho, Moriguchi City, Osaka, Japan

    M. Ohnishi

Authors
  1. S. Nakano
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  2. Y. Kuwano
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  3. M. Ohnishi
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Nakano, S., Kuwano, Y. & Ohnishi, M. High performance a-Si solar cells and new fabrication methods for a-Si solar cells. Appl. Phys. A 41, 267–274 (1986). https://doi.org/10.1007/BF00616048

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  • DOI: https://doi.org/10.1007/BF00616048

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