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Optical and structural properties of thin films deposited from laser fused Zirconia, Hafnia, and Yttria

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Abstract

The optical and structural properties of films deposited from laser sintered Zirconia (ZrO2), Hafnia (HfO2), and Yttria (Y2O3) and from the commercially available (unprocessed material) Zirconia, Hafnia and Yttria, were studied and compared. All the films had low absorption. Films deposited from the laser sintered material had very low optical inhomogeneity. ZrO2 films showed negative inhomogeneity for films deposited from the unprocessed material. The refractive index increased for ZrO2 films deposited from the laser sintered material. HfO2 and Y2O3 films showed positive inhomogeneity when deposited from the unprocessed material. The refractive index of the films of these materials decreased when deposited from the laser sintered material. The thin films of ZrO2 and Y2O3 prepared from laser sintered material had stable monoclinic and cubic structures respectively while HfO2 films were found to be amorphous.

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Authors and Affiliations

  1. Indian Institute of Science, Instrumentation and Services Unit, 560012, Bangalore, India

    M. Swarnalatha

  2. Litton Guidance and Missile Systems, 5500 Canoga Avenue, M.S. 19, 91367, Woodland Hills, CA, USA

    A. F. Stewart

  3. Los Alamos National Laboratory, 87545, Los Alamos, New Mexico, NM, USA

    A. H. Guenther

  4. S. Systems Corporation, 87119, Albuquerque, NM, USA

    C. K. Carniglia

Authors
  1. M. Swarnalatha
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  2. A. F. Stewart
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  3. A. H. Guenther
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  4. C. K. Carniglia
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Swarnalatha, M., Stewart, A.F., Guenther, A.H. et al. Optical and structural properties of thin films deposited from laser fused Zirconia, Hafnia, and Yttria. Appl. Phys. A 54, 533–537 (1992). https://doi.org/10.1007/BF00324335

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  • DOI: https://doi.org/10.1007/BF00324335

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