Skip to main content
SpringerLink
Log in

Laser chemical processing of magnetic materials for recording-head application

  • Surfaces And Multilayers
  • Published:
Applied Physics A Aims and scope Submit manuscript

Abstract

A laser-induced thermochemical reaction has been used to etch single crystalline magnetic ferrite for industrial application to recording-head processing. Scanning focused Ar-ion laser irradiation to ferrite in flowing aqueous solutions of KOH or H3PO4 resulted in etch rates of 350–400 μm/s with aspect ratios of up to 40. Metal-In-Gap (MIG) head structures with Sendust (FeAlSi) have been successfully fabricated using laser chemical processing. The MIG head fabricated by laser chemical processing showed better performance than that by conventional mechanical machining.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. D. Bäuerle (ed.): Laser Processing and Diagnostics Springer Ser. Chem. Phys. Vol. 39 (Springer, Berlin Heidelberg 1984)

    Google Scholar 

  2. D.J. Ehrlich, J.Y. Tsao (eds.): Laser Microfabrication: Thin Film Processes and Lithography (Academic, San Diego 1989)

    Google Scholar 

  3. F.G. Bachmann: Appl. Surf. Sci. 46, 254 (1990)

    Google Scholar 

  4. N. Nomura, K. Yamashita, M. Endo, M. Sasago: Microcircuit Eng. 21, 3 (1993)

    Google Scholar 

  5. N. Shiraishi, S. Hirukawa, Y. Takeuchi, N. Magome: Microlithography World 7, 14 (1992)

    Google Scholar 

  6. T. Yagi, C. Tsang, T.A. Nguyen, K. Ju, G.L. Gorman, G. Castillo: IEEE Trans. MaG-26, 2271 (1990)

    Google Scholar 

  7. H. Takano, H. Fukuoka, M. Suzuki, K. Shiiki, M. Kitada: IEEE Trans. MAG-27, 4678 (1991)

    Google Scholar 

  8. C. Sillen, J. Ruigrok, M. Veprek-Heijman, A. Bode-Fassbender, J. Giesbers: J. Magn. & Magn. Mater. 83, 34 (1990)

    Google Scholar 

  9. M. Takai, S. Nagatomo, T. Koizumi, Y.F. Lu, K. Gamo, S. Namba: In: E-MRS: Laser Processing and Diagnostics(II), ed. by D. Bäuerle, K.L. Kompa, L. Laude (Les Editions de Phys. Les Ulis 1986) p. 57

    Google Scholar 

  10. M. Takai, Y.F. Lu, S. Nagatomo, T. Koizumi, S. Namba: Appl. Phys. A 46, 197 (1988)

    Google Scholar 

  11. Y.F. Lu, M. Takai, S. Nagatomo, S. Namba: Meter. Res. Soc. Symp. Proc. 201, 123 (1991)

    Google Scholar 

  12. Y.F. Lu, M. Takai, S. Nagatomo, S. Namba: Appl. Phys. B 53, 39 (1991)

    Google Scholar 

  13. S. Nagatomo, M. Takai, Y.F. Lu, S. Namba: In Laser and Particle Beam Chemical Processes on Surfaces, ed. by A.W. Johnson, G.L. Loper, T.W. Sigmon (Materials Research Society, Pittsburgh 1989), p. 333

    Google Scholar 

  14. Y.F. Lu, M. Takai, S. Nagatomo, T. Minamisono, S. Namba: Jpn. J. Appl. Phys. 28, 2151 (1989)

    Google Scholar 

  15. Y.F. Lu, M. Takai, S. Nagatomo, S. Namba: Appl. Phys. A 47, 319 (1988)

    Google Scholar 

  16. Y.F. Lu, M. Takai, S. Nagatomo, S. Namba: In Laser and Particle Beam Chemical Processes on Surfaces, ed. by. A.W. Johnson, G.L. Loper, T.W. Sigmon (Materials Research Society, Pittsburgh 1989) p. 339

    Google Scholar 

  17. S. Nagatomo, M. Takai, H. Sandaiji, S. Ohara: US Patent No. 4, 751, 779

  18. M. Takai, S. Namba: In Laser Surface Microprocessing, SPIE Proc. 1352, 18 (1989)

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Faculty of Engineering Science and Research Center for Extreme Materials, Osaka University, Toyonaka, 560, Osaka, Japan

    M. Takai

  2. D. S. Scanner Co., Ltd., 2-22 Izumicho, Higashiku, 540, Osaka, Japan

    S. Nagatomo, H. Kohda & C. Yada

  3. Research and Development Department, NGK Insulators, Ltd., 434-3 Gotanda, Shimozue, 485, Komaki, Japan

    H. Sandaiji & F. Takeya

Authors
  1. M. Takai
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. S. Nagatomo
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. H. Kohda
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. C. Yada
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. H. Sandaiji
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. F. Takeya
    View author publications

    You can also search for this author in PubMed Google Scholar

Rights and permissions

Reprints and permissions

About this article

Cite this article

Takai, M., Nagatomo, S., Kohda, H. et al. Laser chemical processing of magnetic materials for recording-head application. Appl. Phys. A 58, 359–363 (1994). https://doi.org/10.1007/BF00323610

Download citation

  • Received:

  • Accepted:

  • Issue Date:

  • DOI: https://doi.org/10.1007/BF00323610

PACS

Search

Navigation