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Ion-induced densification of pvd films—a choice of the optimum density of ion bombardment

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Abstract

The densification process by ion-assisted physical vapour deposition of films is considered as a consequence of rearrangement of atoms in the near-surface film layer. A model is proposed allowing the quantitative estimate of the optimum ion current density required to produce a film with maximum density.

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References

  1. Movchan and A.V. Demchishin: Phys. Met. Mettalogr.28, 653 (1969)

    Google Scholar 

  2. F. Seitz and J.S. Koehler: Solid State Phys.2, 305 (1956)

    Google Scholar 

  3. S. Aisenberg and R. Chabot: J. Vac. Sci. Technol.10, 104 (1973)

    Google Scholar 

  4. P.J. Martin: J. Mater. Sci.21, 1 (1986)

    Google Scholar 

  5. P.J. Martin: Vacuum36, 585 (1986)

    Google Scholar 

  6. K.-H. Müller: J. Vac. Sci. Technol. A4, 461 (1986)

    Google Scholar 

  7. K.-H. Müller: J. Appl. Phys.59, 2803 (1986)

    Google Scholar 

  8. K.-H. Müller: Appl. Phys. A40, 209 (1986)

    Google Scholar 

  9. K.-H. Müller: Phys. Rev. B35, 7906 (1987)

    Google Scholar 

  10. G.I. Grigorov: I.N. Martev, J.-P. Langeron, J.-L. Vignes, Thin Solid Films161, 249 (1988)

    Google Scholar 

  11. K.G. Grigorov, D. Bouchier, G.I. Grigorov, J.-L. Vignes, J.-P. Langeron: Appl. Phys. A58, 619 (1994)

    Google Scholar 

  12. O. Burat:Thèse Univ. Paris-Sud, Orsay, 136 (1991)

  13. S.S. Nandra, F.G. Wilson and C.D. DesForges: Thin Solid Films107, 335 (1983)

    Google Scholar 

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Authors and Affiliations

  1. Institute of Electronics, Bulgarian Academy of Sciences, 72, blvd. Tzar. Chaussee, 1784, Sofia, Bulgaria

    G. I. Grigorov

  2. LISE, Fac. Universitaires Notre-Dame de la Paix, Rue de Bruxelles 61, 5000, Namur, Belgique

    K. G. Grigorov, R. Sporken & R. Caudano

Authors
  1. G. I. Grigorov
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  2. K. G. Grigorov
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  3. R. Sporken
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  4. R. Caudano
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Grigorov, G.I., Grigorov, K.G., Sporken, R. et al. Ion-induced densification of pvd films—a choice of the optimum density of ion bombardment. Appl. Phys. A 63, 399–401 (1996). https://doi.org/10.1007/BF01567334

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  • DOI: https://doi.org/10.1007/BF01567334

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