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Received: 25 July 1997/Accepted: 1 October 1997
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Born, A., Wiesendanger, R. Scanning capacitance microscope as a tool for the characterization of integrated circuits . Appl Phys A 66 (Suppl 1), S421–S426 (1998). https://doi.org/10.1007/s003390051175
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DOI: https://doi.org/10.1007/s003390051175