Abstract.
A new beam homogenizer device which leaves the beam parameter product almost unaffected is presented. Excimer laser beams usually show a nearly Gaussian beam profile along the short beam axis whereas along the long beam axis a nearly flat-top profile is provided. The new beam homogenizer efficiently converts the short beam axis into a top-hat profile featuring nearly the same divergence as the incoming laser beam. Depending on the output beam profile of the excimer laser the homogenizer presented provides a beam profile with a homogeneity of ±5% to ±10% within an area covering 65% to 70% of the total pulse energy.
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Received: 21 July 1999 / Accepted: 31 August 1999 / Published online: 22 December 1999
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Jasper, K., Scheede, S., Burghardt, B. et al. Excimer laser beam homogenizer with low divergence . Appl Phys A 69 (Suppl 1), S315–S318 (1999). https://doi.org/10.1007/s003390051407
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DOI: https://doi.org/10.1007/s003390051407