Skip to main content
SpringerLink
Log in

Parallel fabrication of artificially designed superlattices by combinatorial laser MBE

  • Published:
Applied Physics A Aims and scope Submit manuscript

Abstract.

A system for parallel synthesis of atomically regulated lattices and nano-structured heterojunctions has been developed. This combinatorial laser MBE system is composed of a UHV-PLD chamber, scanning RHEED for in situ diagnostics of reactions at various areas of substrate surface, a pair of fixed and moving masks to define the film deposition area, and a computer for controlling the operation conditions as functions of deposition area and time. In this system, oxide layered lattice strips were deposited in parallel on a SrTiO3 substrate under RHEED observation of individual strips with different compositions and/or layer thickness.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

Author information

Authors and Affiliations

  1. Ceramics Materials and Structures Laboratory, Tokyo Institute of Technology, Japan, , , , , , JP

    H. Koinuma, T. Koida, T. Ohnishi & D. Komiyama

  2. Interdisciplinary Graduate School of Science and Engineering, Tokyo Institute of Technology, 4259 Nagatsuta, Midori-ku, Yokohama 226-8503, Japan, , , , , , JP

    M. Lippmaa & M. Kawasaki

Authors
  1. H. Koinuma
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. T. Koida
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. T. Ohnishi
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. D. Komiyama
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. M. Lippmaa
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. M. Kawasaki
    View author publications

    You can also search for this author in PubMed Google Scholar

Additional information

Received: 21 July 1999 / Accepted: 5 October 1999 / Published online: 22 December 1999

Rights and permissions

Reprints and permissions

About this article

Cite this article

Koinuma, H., Koida, T., Ohnishi, T. et al. Parallel fabrication of artificially designed superlattices by combinatorial laser MBE . Appl Phys A 69 (Suppl 1), S29–S31 (1999). https://doi.org/10.1007/s003399900362

Download citation

  • Issue Date:

  • DOI: https://doi.org/10.1007/s003399900362

Search

Navigation