Skip to main content
SpringerLink
Log in

Experimental and theoretical study of the cracking behavior of sol-gel-derived SiO2 film on InP substrate

  • Published:
Applied Physics A Aims and scope Submit manuscript

Abstract.

In this paper, we study and characterize the cracking behavior of a sol-gel-derived amorphous silica film on a InP substrate. The sol-gel silica films are deposited by spin-coating and rapid thermal processing (RTP). It is observed that the volatility of the III-V semiconductor results in the cracking of the films when the annealing temperature is higher than 450 °C, and that the crack patterns are all parallel or perpendicular to <100>. The experimental results on the crack patterns in the sol-gel silica films are then theoretically analyzed. In addition, the critical thicknesses of the sol-gel films on InP are compared with those deposited on Si.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

Author information

Authors and Affiliations

  1. Photonics Research Group, School of EEE, Nanyang Technological University, Nanyang Avenue, Singapore 639798 (E-mail: elinj@ntu.edu.sg), , , , , , SG

    J. Liu, Y.L. Lam, Y.C. Chan, Y. Zhou, B.S. Ooi & Z.S. Yun

Authors
  1. J. Liu
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Y.L. Lam
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Y.C. Chan
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Y. Zhou
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. B.S. Ooi
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. Z.S. Yun
    View author publications

    You can also search for this author in PubMed Google Scholar

Additional information

Received: 17 February 1999 / Accepted: 31 August 1999 / Published online: 23 February 2000

Rights and permissions

Reprints and permissions

About this article

Cite this article

Liu, J., Lam, Y., Chan, Y. et al. Experimental and theoretical study of the cracking behavior of sol-gel-derived SiO2 film on InP substrate . Appl Phys A 70, 341–343 (2000). https://doi.org/10.1007/s003390050057

Download citation

  • Issue Date:

  • DOI: https://doi.org/10.1007/s003390050057

Search

Navigation