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Generation of multiply charged silicon and germanium ions by excimer laser pulses

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Abstract

Plasma bursts were produced by focusing excimer-laser (XeCl, 308 nm) pulses on Ge and Si targets. At moderate laser fluences (∼30 MW/cm2) high-intensity Ge3+ and Si3+ ion pulses were extracted from the laser-produced plasma. A peculiar electrical circuit allows a self-bunching of the beam. By time-of-flight method, the currents produced by the ions of different charge number were measured. Peak currents of 620 mA and 800 mA were recorded for Ge3+ and Si3+ ions, respectively, with an extraction voltage of only 400 V.

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Luches, A., Nassisi, V. & Pecoraro, A. Generation of multiply charged silicon and germanium ions by excimer laser pulses. Appl. Phys. B 57, 163–165 (1993). https://doi.org/10.1007/BF00334530

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  • DOI: https://doi.org/10.1007/BF00334530

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