Abstract
A polyimide-based process for the fabrication of vertical structures with high aspect ratio has been developed. O2 reactive ion etching (O2 RIE) has been employed in the polyimide processing. Achieved etching characteristics of the O2 RIE system are: 4.0 μm/min etching rate, 15 aspect ratio, 75 μm etching depth. Polyimide has excellent chemical and thermal properties which makes it a good building material for micromachines. Polyimide could be also used as molds for electroplating. Electroplated copper structures were formed in the polyimide molds and metal gears were fabricated by these fabrication technologies. New possibilities for micromachining were opened by the use of O2 RIE and electroplating.
Similar content being viewed by others
References
Liu, C.; Tsao, T.; Tai, Y.; Ho, C. (1994) “Surface micromachined magnetic actuator”, Proc. IEEE Micro Electro Mechanical Systems Workshops, pp. 57–62.
Shaw, K.A.; Adams, S.G.; MacDonald, N.C. (1993) “A single-mask lateral accelerometer”, Tech. Digest of 7th Int. Conf. on Solid-state Sensors ana Actuators, pp. 210–213
Menz, W.; Bacher, W.; Harmening, M.; Michel, A. (1991) “The LIGA teqnique a novel concept for microstructures and the combination with Si-technologies by injection molding”, Proc. IEEE Micro Electro Mechanical Systems Workshops, pp. 69–73
Frazier, A.B.; Allen, M.G. (1992) “High aspect ratio electro-plated microstructures using a photosensitive polyimide process”, Proc. IEEE Micro Electro Mechanical Systems Workshops, pp. 87–92
Engelman, G.; Engelmann, O.; Ehrmann, O.; Simon, J.; Reichl, H. (1992) “Fabrication of high depth-to-width aspect ratio microstructures”, Proc. IEEE Micro Electro Mechanical Systems Workshops, pp. 93–98
Ikuta, K.; Hirowatari, K.; Ogata, T. (1994) “Three dimensional micro integrated fluid systems (MIFS) fabricated by stereo lithiography”, Proc. IEEE Micro Electro Mechanical Systems Workshops, pp. 1–6
Takagi, T.; Nakajima, N. (1994) “Architecture combination by micro photoforming process”, roc. IEEE Micro Electro Mechanical Systems Workshops, pp. 211–216
Furuya, A.; Shimokawa, F.; Matsuura, T.; Sawada, R. (1993) “Micro-grid fabrication of fluorinated polyimide by using magnetically controlled reactive ion etching (MC-RIE)”, Proc. IEEE Micro Electro Mechanical Systems Workshops, pp. 59–64
Murakami, K.; Wakabayashi, Y.; Minami K.; Esashi, M. (1993) “Cryogenic dry etching for high aspect ratio microstructures”, Proc. IEEE Micro Electro Mechanical Systems Workshops, pp. 65–69
Takinami, M.; Minami K.; Esashi, M. (1992) “High-speed directional low-temperature dry etching for bulk silicon micromachining”, Tech., Dig. of the 11th Sensor Symposium, pp. 15–18
Wu, S.Y.;Souza-Machado, R.D.;Denton, D.D. (1993) “Dielectric and chemical modifications in polyimide films etched in O2/CF4 plasmas”, J. Vac. Sci. Technol. A, Vol. 11 (4), pp. 1337–1345
Kawamura, S.;Minami, K.;Esashi, M. (1993) “Fabrication of distributed electrostatic micro actuator (DEMA)”, J. of Microelectromechanical Systems, Vol. 2, No. 3, pp. 121–127
Author information
Authors and Affiliations
Additional information
This work was supported by Japanese ministry of Education Science and Culture under a grant-in-Aid No. 03102001.
Rights and permissions
About this article
Cite this article
Murakami, K., Minami, K. & Esashi, M. High aspect ratio fabrication method using O2 RIE and electroplating. Microsystem Technologies 1, 137–142 (1995). https://doi.org/10.1007/BF01294805
Received:
Accepted:
Issue Date:
DOI: https://doi.org/10.1007/BF01294805