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Micromechanical elements for detection of molecules and molecular design

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Abstract

Photolithographic preparation of thin films and stacks of them were combined with anisotropic silicon etching and free standing film technology in order to realize three dimensional micro components for studies in detection and optimization of biomolecules. A polymer based SFM sensor was developed and tested in the measurement of thin film roughness and in the detection of holes in molecular films as well as in the detection of single DNA molecules. This “novolever” shows surprisingly high mechanical stability and provides high resolution SFM images of sensible molecules. Experimental arrangements of miniaturized chemical parallel processing for combinatorial and evolutionary synthesis strategies including silicon micro compartment arrays with free standing optical membranes and thin film filters have been proposed and the manufacturing of micro compartment arrays is described.

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Authors and Affiliations

  1. Inst. für Physikalische Hochtechnologie e.V. Jena, Helmholtzweg 4, D-07743, Jena, Germany

    J. M. Köhler & R. Pechmann

  2. Max-Plank-Inst. für Biophysikalische Chemie Göttingen, Germany

    A. Schaper, A. Schober & Th. M. Jovin

  3. Inst. für Molekulare Biotechnologie Jena, Germany

    A. Schwienhorst

  4. Evotech Biosystems Hamburg, Germany

    M. Thürk

Authors
  1. J. M. Köhler
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  2. R. Pechmann
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  3. A. Schaper
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  4. A. Schober
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  5. Th. M. Jovin
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  6. M. Thürk
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  7. A. Schwienhorst
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Additional information

We thank M. Sossna, B. Rau, H. Porwol, I. Menzel, F. Jahn and W. Schubert for technical assistance. The Inst. of Semiconductor Physics Frankfurt/O is acknowledged for CVD-deposition of membrane films. The work on SFM-sensors was supported by the Max-Planck-Gesellschaft. The work on micro compartment arrays was supported by the BMBF (No 0310713)

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Köhler, J.M., Pechmann, R., Schaper, A. et al. Micromechanical elements for detection of molecules and molecular design. Microsystem Technologies 1, 202–208 (1995). https://doi.org/10.1007/BF01371496

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  • DOI: https://doi.org/10.1007/BF01371496

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