Abstract
An inductive ABS speed and position sensor has been realized, based on an arrangement of batch-fabricated microcoils in a differential transformer configuration. The position of a metallic toothed wheel is measured with a precision of ±2 μm in a 0 to 3.2 kHz bandwidth and at a distance of 0 to 2 mm, with a transformer power consumption of less than 50 mW. Both the differential sensor approach and the ratiometric analysis allow for position detection that is insensitive to target speed, target distance and sensor temperature. The AC excitation allows the frequency to be adapted to the target material and to measure down to zero speed.
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Received: 1 November 1996/Accepted: 13 November 1996
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de Coulon, Y., Bourgeois, C., de Lambilly, H. et al. Microcoil speed and position sensor for automotive applications. Microsystem Technologies 3, 61–63 (1997). https://doi.org/10.1007/s005420050056
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DOI: https://doi.org/10.1007/s005420050056