PbZr _x Ti _1−x O₃ hydrothermal synthesis on titanium substrate for actuators

Abstract

 This paper reports on a new single hydrothermal process for the deposition of PZT thin films on titanium substrates. The Zr/(Zr+Ti) ratio is adjusted by controlling the Ti and Zr ionic concentrations.

The films are analysed by X-ray powder diffraction (XRD), and Scanning Electron Microscopy (SEM). A PZT film of 5 μm thickness (Zr=0.52, Ti=0.48) very interesting from the point of view of piezoelectric constants, was successfully obtained by the control of ions concentration in the solution. The XRD patterns show well-defined peaks corresponding to a well-crystallised PZT phase with the ratio Zr/(Zr+Ti)=0.52. This composition is called the morphotropic-phase boundary (MPB), which means the separation between the tetragonal and rhombohedral phases. SEM micrographs show microcrystalline thin films with homogenous thickness and distribution on the titanium substrate. The microcrystals are cubic. It is demonstrated that large vibration amplitudes can be excited with these films under low voltage supply (5 V).