Cost estimation for LIGA fabrication flows using process design methods

Abstract

 The design of microstructured components fabricated by LIGA combines concurrently the layout for mask lithography as well as the configuration of appropriate process sequences that allow the error-free fabrication of the microstructures. This paper describes methods and tools that support the design of consistent process step configurations that allow to predict in advance the effort assigned to specific process arrangements. Based on formal process description means the microsystems' designer can edit, assess and optimise consistent technology steps with regard to costs, time and feasibility providing an interface to later layout verification.