Section V. Application to semiconductors and optics
Progress report on Aramis, the 2 MV tandem at Orsay

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Abstract

Aramis is a home built multipurpose 2 MV electrostatic tandem accelerator. A large variety of ions are available for high energy implantation. Characterization possibilities are also quite large in the Van de Graaff mode owing to the Penning positive ion source in the terminal. A second beam line is now available that sends the beam into the target chamber of the 200 kV medium current implanter. We will provide a progress report on the machine and present some results regarding in situ studies of multilayer mixing and implanted silicide layers

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