Section VI. New detection methods
On the use of a gas filled magnetic spectrograph in elastic recoil detection

https://doi.org/10.1016/0168-583X(92)95483-8Get rights and content

Abstract

The applicability of a (gas filled) spectrograph in elastic recoil detection analyses is discussed. We have optimized the experimental parameters for the determination of low oxygen concentration in hydrogenated amorphous Si. We demonstrate that for this case the value for the detection limit is well below 0.05 at.%.

References (11)

  • S.S. Klein

    Nucl. Instr. and Meth.

    (1986)
  • J.P. Stoquert et al.

    Nucl. Instr. and Meth.

    (1989)
  • R. Groleau et al.

    Nucl. Instr. and Meth.

    (1983)
  • B. Cohen et al.

    Nucl. Phys.

    (1958)
  • J.E. Spencer et al.

    Nucl. Instr. and Meth.

    (1967)
There are more references available in the full text version of this article.

Cited by (5)

  • Element-dependent ERDA probing depths using different detection systems

    1997, Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
  • Light element depth profiling using elastic recoil detection

    1992, Nuclear Inst. and Methods in Physics Research, B
  • Elastic recoil detection

    1993, Reports on Progress in Physics
View full text