The use of neutral Cs vapor flow in a negative-ion sputter source
References (10)
- et al.
Nucl. Instr. and Meth.
(1974) Nucl. Instr. and Meth.
(1984)- et al.
Nucl. Instr. and Meth.
(1980) - et al.
Nucl. Instr. and Meth.
(1982) - et al.
Nucl. Instr. and Meth.
(1984)
There are more references available in the full text version of this article.
Cited by (1)
A high-intensity multisample Cs sputter source
1990, Nuclear Inst. and Methods in Physics Research, B
- ∗
This research was supported by the US Department of Energy under Contract W-31-109-Eng-38.
Copyright © 1985 Published by Elsevier B.V.