RBS-PIXE analysis on μm scale on thin film high-Tc superconductors

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Abstract

To determine the stoichiometry of thin films of YBaCuO high-Tc superconductors on a μm scale, a beam of 3.045 MeV α's was used. The RBS signal has been used to determine the metal concentrations and the 16O(α, α) 16O resonance reaction for the oxygen concentration determination. The metal concentrations were calculated by fitting the RBS spectra with the computer program RUMP. The oxygen concentration was calculated by comparing the resonance oxygen yield of the film with that induced in a pure MgAl2O4 crystal as a standard. The YBaCuO film thickness was determined in the lateral direction in order to see whether there was a lateral gradient in the film thickness. The films were prepared in sets of two by electron gun evaporation, one on an Al2O3 substrate and the other on a SrTiO3 substrate. The latter sample has been annealed to get the required perovskite crystal structure. PIXE was used to check the films for contamination.

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