ISSN:
1089-7623
Quelle:
AIP Digital Archive
Thema:
Physik
,
Elektrotechnik, Elektronik, Nachrichtentechnik
Notizen:
An electron cyclotron resonance (ECR) plasma production method using electron cyclotron wave is presented. This method is not subjected to any cutoff-density scaling, and is capable of generating dense plasmas far beyond the critical density of an ordinary wave. It has been demonstrated that a plasma density more than 1013 cm−3 (argon) is obtained with a low frequency (2.45 GHz) and low power (11 kW) microwave. The experimental results and the application to plasma neutralizer are described. The experimental verification of superpermeability of Nb membrane in a plasma environment is in progress to develop a plasma neutralizer with Nb-membrane wall. The design parameters of Nb-membrane pump are presented. © 1998 American Institute of Physics.
Materialart:
Digitale Medien
URL:
http://dx.doi.org/10.1063/1.1148607