ISSN:
0049-8246
Keywords:
Chemistry
;
Analytical Chemistry and Spectroscopy
Source:
Wiley InterScience Backfile Collection 1832-2000
Topics:
Physics
Notes:
A precise and practical x-ray fluorescence technique using the fundamental-parameter method and the LAMA computer program for the simultaneous determination of composition and thickness of single- and multiple-layer thin films is reviewed. Results from the analysis of Fe-Ni single-layer and chromium, Fe-Ni, copper triple-layer thin films are discussed. The analysis showed that x-ray absorption and enhancement caused by the inter-element effect in single-layer and the inter-layer effect in multiple-layer films were corrected properly. The accuracy of the analysis is estimated to be ±1% for composition and ±3% for thickness.
Additional Material:
1 Ill.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1002/xrs.1300200107