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Quantitative SIMS of III-V compounds of graded composition without the use of standards (1991)

Crapper, M. D. ; Chew, A. ; Bradley, R. H. ; [et al.]

Chichester [u.a.] : Wiley-Blackwell

Surface and Interface Analysis 17 (1991), S. 177-182

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ISSN: 0142-2421

Keywords: Chemistry ; Polymer and Materials Science

Source: Wiley InterScience Backfile Collection 1832-2000

Topics: Physics

Notes: A method is proposed for obtaining the matrix element SIMS sensitivity factors for III-V compounds of the form ABxC1-x without using standards. This method tests for variation of sensitivities with concentration and, in the case where no strong variation is shown, allows determination of the sensitivity functions by use of samples where the concentrations of two elements vary continuously over a wide range. This method provides a no-standards route to quantification of matrix element concentrations in SIMS depth profiles of layers with graded compositions.

Additional Material: 3 Ill.

Type of Medium: Electronic Resource

URL: http://dx.doi.org/10.1002/sia.740170403

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