ISSN:
0142-2421
Keywords:
Chemistry
;
Polymer and Materials Science
Source:
Wiley InterScience Backfile Collection 1832-2000
Topics:
Physics
Notes:
The York multi-spectral Auger electron microscope has been used to examine the correlations between four images measured simultaneously by collecting energetic backscattered electrons (BSEs) with four quadrants of an Si p-n junction BSE detector. Digital signal processing of the four images reveals the topography expected of the polyhedra on the surface of an Ag-coated, anisotropically etched Si sample. Scatter diagrams formed form the pair of topographical images appear as distorted stereographic projections of the distribution of local surface normals. The use of such projections via models of the scattering process is proposed as a means of correcting topographical artifacts in Auger, EDX and other chemically specific images.
Additional Material:
5 Ill.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1002/sia.740170407
