ISSN:
0142-2421
Keywords:
Chemistry
;
Polymer and Materials Science
Source:
Wiley InterScience Backfile Collection 1832-2000
Topics:
Physics
Notes:
In order to overcome the poor quantitativeness of conventional SIMS, sputtered neutral mass spectrometry (SNMS) employing non-resonant laser post-resonant laser post-ionization has been studied. By studied. By combining a time-of-flight (TOF) analyzer with a powerful excimer laser, it was confirmed that non-resonant laser post-ionization is capable of quantitative analysis of impurities at the pm level. On comparing laser wavelengths, 193 nm (ArF) gave a higher post-ionization efficiency than 248 nm (KrF). It was also demonstrated that the electronegative element sulphur can be detected as positive ions by post-ionization. Furthermore, surface metallic contaminants in a small area (250 μm square) could be determined down to 1011 atoms cm-2.
Additional Material:
6 Ill.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1002/sia.740171105
