ISSN:
0570-0833
Keywords:
Semiconductors
;
Interfaces
;
Ellipsometry
;
Spectroscopy
;
Chemistry
;
General Chemistry
Source:
Wiley InterScience Backfile Collection 1832-2000
Topics:
Chemistry and Pharmacology
Notes:
Measurement of the state of polarization of reflected light (ellipsometry) permits the determination of the thickness and refractive index of thin layers formed on a surface. The IR absorption spectra of such thin layers, which can be measured by means of internal reflection spectroscopy (IRS), provide information about their chemical composition. These methods have been used to study adsorption processes and the formation of reaction layers at semiconductor interfaces, and may also be used for measurements of free charge carriers in the space-charge region and in surface states. Results of such investigations are given in this article.
Additional Material:
16 Ill.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1002/anie.196801611
