ISSN:
0025-116X
Keywords:
Chemistry
;
Polymer and Materials Science
Source:
Wiley InterScience Backfile Collection 1832-2000
Topics:
Chemistry and Pharmacology
,
Physics
Notes:
Poly(vinyl alcohols) (PVA's) with pendent styrylpyridinium (SbQ), styrylquinolinium (QQ), or oxystyrylquinolinium (OQQ) exhibit anomalously high photosensitivity, even if the content of photosensitive groups is very low. This phenomenon was studied by measuring the sensitivity to crosslinking quantitatively using monochromatic light. When the content of SbQ or OQQ exceeds ca. 1 mol-%, the photoinduced gelation behaviour was found to be in the line with Charlesby's equation, suggesting that the absorbed light energy leads specifically to interamacromolecular photodimerization of SbQ or OQQ. Under these circumstances, the quantum efficiency for the photodimerization of SbQ and OQQ was estimated to be in the ranges of 0,31-0,37 and 0,10-0,17, respectively. The applicability of PVA-SbQ to water-developable photoresists for microfabrications is discussed. The sensitivity characteristics of PVA having OQQ and analogous groups is also mentioned in view of the application to Ar laser resists.
Additional Material:
10 Ill.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1002/macp.1987.021881218
