ISSN:
0887-624X
Keywords:
Chemistry
;
Polymer and Materials Science
Source:
Wiley InterScience Backfile Collection 1832-2000
Topics:
Chemistry and Pharmacology
Notes:
The effect of power variation on the polymerization kinetics and on the polymer structure is reported for RF glow discharges fed with C2F6-H2 mixtures. Both deposition rate and polymer structure trends can be correlated to the variations of gas-phase species density (atoms, radicals, and charged species) and can be explained by considering the competition of the deposition and etching process.
Additional Material:
15 Ill.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1002/pola.1990.080281217