ISSN:
1573-8760
Source:
Springer Online Journal Archives 1860-2000
Topics:
Physics
Notes:
Conclusion We have measured the coefficients of reflection of KrF-laser radiation from a silicon surface, and also from its coating films SiO2, Al, PSG, and their combinations. We have shown that specular reflection from a silicon surface with various films can vary in intensity not only on account of the change of absorption in the material, but also as a result of scattering of the radiation by the surface waves that are rapidly produced after the silicon melting.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/BF01121884