ISSN:
0392-6737
Keywords:
Optical properties and materials
Source:
Springer Online Journal Archives 1860-2000
Topics:
Physics
Description / Table of Contents:
Riassunto In questo lavoro si presentano recenti misure FTIR relative allo stretching del legame Si−O ed al bending dei legami Si−O−Si O−Si−O in film amorfi di biossido di silicio. Si paragonano i risultati ottenuti per film cresciuti secondo differenti tecniche: APCVD, LPCVD, PACVD ed, infine, ossidazione termica. Si studia inoltre l’effetto dell’annealing termico sullo spettro ottico di assorbanza.
Notes:
Summary In this work we report new FTIR absorbance measurements due to Si−O stretching bond, Si−O−Si and O−Si−O bending bonds of silicon dioxide amorphous films. We compare the optical results obtained from films grown by APCVD, LPCVD, PACVD and thermal oxidation techniques. The effect of thermal annealing on optical obsorbance structures has been studied.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/BF02454214
