ISSN:
1432-0630
Schlagwort(e):
81.15
;
81.40
Quelle:
Springer Online Journal Archives 1860-2000
Thema:
Maschinenbau
,
Physik
Notizen:
Abstract The densification process by ion-assisted physical vapour deposition of films is considered as a consequence of rearrangement of atoms in the near-surface film layer. A model is proposed allowing the quantitative estimate of the optimum ion current density required to produce a film with maximum density.
Materialart:
Digitale Medien
URL:
http://dx.doi.org/10.1007/BF01567334