Electronic Resource
Woodbury, NY
:
American Institute of Physics (AIP)
Applied Physics Letters
69 (1996), S. 2065-2067
ISSN:
1077-3118
Source:
AIP Digital Archive
Topics:
Physics
Notes:
Spectroscopic ellipsometry was used to assess the preparation of smooth and abrupt GaN, AlN, and AlGaN surfaces by wet chemical treatments in real time. About 20–50 A(ring) of overlayer typically can be removed from air-exposed samples. © 1996 American Institute of Physics.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.116881
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