ISSN:
1077-3118
Source:
AIP Digital Archive
Topics:
Physics
Notes:
We synthesized titanium nitride and titanium silicide layers on silicon by only one-step multipulse laser irradiation of titanium-coated silicon wafers in a jet of nitrogen, with characteristics appropriate for utilization in metallization schemes with very large scale integration devices.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.99674