ISSN:
1089-7550
Source:
AIP Digital Archive
Topics:
Physics
Notes:
Laser Thomson-scattering diagnostics of electron energy distribution function (EEDF) was carried out for inductively coupled cyclo–C4F8/Ar and CF4/Ar plasmas at 25 mTorr. Care was taken to ascertain that the observed Thomson spectra are unaffected by other laser-induced effects, in particular by Raman scattering. Admixing of C4F8 and CF4 with Ar resulted in marked deviation of EEDF from Maxwellian. The mechanism leading to non-Maxwellian EEDF was also studied by a Monte Carlo simulation. The results suggest that the major factors responsible are rapid electron energy loss due to vibrational excitation and the effect nonlocal electron kinetics associated with localized electron heating. © 2002 American Institute of Physics.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.1493659