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  • 1
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 86 (1999), S. 6770-6772 
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: The microstructure and optical properties of amorphous and crystalline Ge2Sb2Te5 thin films prepared under different sputtering conditions were investigated. The microstructure of amorphous films was modified by changing the sputtering Ar gas pressure during the deposition. The optical properties and the microstructure of the sample prepared at high Ar gas pressure were remarkably different from the samples prepared at low pressures. A strong correlation between the microstructure and optical properties of Ge2Sb2Te5 thin films was found. © 1999 American Institute of Physics.
    Type of Medium: Electronic Resource
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