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Pressure sensing with a flexural plate wave resonator (1999)

Butler, M. A. ; Hill, M. K. ; Spates, J. J. ; [et al.]

[S.l.] : American Institute of Physics (AIP)

Journal of Applied Physics 85 (1999), S. 1998-2000

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Details

ISSN: 1089-7550

Source: AIP Digital Archive

Topics: Physics

Notes: A silicon nitride membrane supported on a silicon substrate and having a sealed air cavity underneath has been used as a pressure sensor. Membrane resonances are excited and detected using conductor lines patterned on the membrane in combination with an applied magnetic field. The resonant frequency depends strongly upon membrane tension and thus the differential pressure across the membrane. © 1999 American Institute of Physics.

Type of Medium: Electronic Resource

URL: http://dx.doi.org/10.1063/1.369196

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