ISSN:
1089-7550
Source:
AIP Digital Archive
Topics:
Physics
Notes:
Diamondlike carbon (DLC) films were directly deposited onto germanium (Ge) and zinc sulphide (ZnS) slices by a capacitively coupled 13.56 MHz rf glow discharge plasma with Ar-C2H2 gas mixtures. The IR transmittance was measured using a Fourier-transform infrared spectrometer. The maximum values of the IR transmission of Ge and ZnS with DLC films on both sides are 99% and 95.8%, respectively, which come up to the theoretical values. A nonuniform DLC film, of which the refractive index gradually changes along the thickness, has been successfully deposited onto a Ge slice for the first time and the IR transmission of a nonuniform DLC film coated onto both sides of a Ge substrate at the wider wave band of 2.5–15 μm is over 85%.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.357813
