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X-ray diffraction of nonuniform GexSi1−x/Si strained-layer superlattices (1993)

Li, J. H. ; Mai, Z. H. ; Cui, S. F.

[S.l.] : American Institute of Physics (AIP)

Journal of Applied Physics 73 (1993), S. 7955-7956

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ISSN: 1089-7550

Source: AIP Digital Archive

Topics: Physics

Notes: GexSi1−x/Si strained-layer superlattices have been studied by means of double-crystal x-ray rocking curves. Double peaks in the same order superlattice reflections or strong oscillation fringes near the superlattice peaks were observed in the rocking curves for two different samples. Good agreement between theoretical simulations and their experimental counterparts were obtained. Our results demonstrate that these phenomena are attributed to serious local variation in layer thickness and composition.

Type of Medium: Electronic Resource

URL: http://dx.doi.org/10.1063/1.353949

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