Electronic Resource
[S.l.]
:
American Institute of Physics (AIP)
Journal of Applied Physics
70 (1991), S. 7392-7396
ISSN:
1089-7550
Source:
AIP Digital Archive
Topics:
Physics
Notes:
The effect of thermal annealing of semi-insulating InP wafers in the 660–820 °C temperature range under SiNx capping condition is studied by electron paramagnetic resonance (EPR) spectroscopy. The annealing leads to the formation of electrically active, deep thermal donors with total defect concentrations up to 1016 cm−3. The thermal donors are of intrinsic origin. By transient EPR spectroscopy the activation energies for electron emission of the dominant thermal donors were determined to be 0.40 and 0.14 eV, respectively.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.349735
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