ISSN:
1089-7550
Source:
AIP Digital Archive
Topics:
Physics
Notes:
Experimental results are reported concerning the synthesis of pure, hard, and adherent titanium nitride layers by multipulse excimer (λ=308 nm) laser irradiation in a nitrogen or ammonia atmosphere. It is shown that the process is more efficient when the irradiation is performed in a nitrogen atmosphere. The general characteristics of synthesized surface compound layers are compatible with the requirements of utilization in microelectronics.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.347213