Electronic Resource
[S.l.]
:
American Institute of Physics (AIP)
Journal of Applied Physics
67 (1990), S. 2890-2893
ISSN:
1089-7550
Source:
AIP Digital Archive
Topics:
Physics
Notes:
Diamondlike carbon films were prepared by electron cyclotron resonance chemical vapor deposition. Structures of the carbon films were characterized by Raman spectroscopy and Fourier-transform infrared spectroscopy. The relationship between the properties of films and growth conditions has been examined. High-energy ion species extracted from a discharge of methane in the electron cyclotron resonance cavity, which is positively-biased electrically against the earthed substrate, have an important role in the growth behavior of hard diamondlike carbon films.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.345428
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