ISSN:
1089-7623
Source:
AIP Digital Archive
Topics:
Physics
,
Electrical Engineering, Measurement and Control Technology
Notes:
rf driven multicusp ion sources have been successfully used in various different applications. Lately the Plasma and Ion Source Technology Group at Lawrence Berkeley National Laboratory has been developing a rf ion source for neutron production and a high current density cw-operated ion source for SIMOX (Separation by Implantation of Oxygen)-application. The group has developed a small ion source, which consists of a quartz plasma chamber, an external rf-antenna, an extraction electrode, and a target assembly, all in a tube that is approximately 25 cm in length and 5 cm in diameter. Another neutron generator currently under development is a multiaperture, high power generator. The neutron generator currently operates at 1% duty cycle, 80 kV, and 150 mA of deuterium beam. The neutron yield measured from the generator is 1.6×107 n/s. For oxygen implantation, the group has been developing a source which could provide a high percentage of O+ at high current density using cw operation. A dual-antenna has been developed for the source to ensure reliable long life operation. The development of these sources will be discussed in this article. © 2002 American Institute of Physics.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.1430519
