ISSN:
1089-7623
Source:
AIP Digital Archive
Topics:
Physics
,
Electrical Engineering, Measurement and Control Technology
Notes:
A quartz-crystal microbalance technique for measuring total sputter yields in ion–surface collisions is described. The electronic circuit to drive the quartz crystal ensures low noise and high frequency stability. By measuring total sputter yields for impact of singly charged ions on LiF target films a sensitivity limit of 0.5% of a monolayer per minute could be achieved. © 1999 American Institute of Physics.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.1149979