ISSN:
1089-7623
Source:
AIP Digital Archive
Topics:
Physics
,
Electrical Engineering, Measurement and Control Technology
Notes:
This article describes the optimization procedure to design a compact scintillator which has a maximum secondary electron collection efficiency without the need of a bias voltage for a focused ion beam (FIB) system. The optimized scintillator design was proven to be very effective for focused ion beam systems. By doing design optimization theoretically and experimentally, a 100% collection was realized for a simple, compact and robust scintillator structure without the bias voltage. So far our experimental study is within the scope of FIB imaging, but we have reasons to believe that the optimized designs or the optimization methodology discussed in this article should be useful in other charged particle applications such as scanning electron microscopy or wherever a scintillator is used to collect secondary electrons. © 1998 American Institute of Physics.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.1148483
