ISSN:
1089-7623
Source:
AIP Digital Archive
Topics:
Physics
,
Electrical Engineering, Measurement and Control Technology
Notes:
We have developed a Fourier transform infrared spectrometer, the absorption cell of which is utilized as a plasma reactor by winding the rf coil around it to couple directly the rf power. The infrared absorption spectra of some fragmented and synthesized molecules produced in the rf glow-discharge plasma are observed by employing five source gases: CO2, CD4, CF4 (in Kr), SF6, and a N2/O2 mixture. The measurements are made at 0.5 cm−1 apodized resolution on 7.5 and 7.8 MHz rf frequencies with the input rf power ranging between 30–75 W. The products assigned at present are: carbon monoxide in CO2 plasma, CD2H2 in CD4 plasma, and nitrous oxide (N2O) in a N2/O2-mixture plasma. A strong but not clearly assigned spectrum of fragmented molecules in SF6 plasma can also be observed. © 1997 American Institute of Physics.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.1148140
