ISSN:
1089-7623
Source:
AIP Digital Archive
Topics:
Physics
,
Electrical Engineering, Measurement and Control Technology
Notes:
The different kinds of ion sources have been most commonly classified according to the extracted beam parameters: ion charge state, energy and current, and beam quality. We adopt here a somewhat different approach: ion sources are usually plasma sources where each component (ionic as well as electronic) plays an important role. This article deals with the experimental techniques which can be used to get information on the plasma state of an ion source. In Section II the interest of the different plasma parameters is discussed. Section III describes a few well-known techniques of plasma diagnostics; examples of their applications on ion sources or related devices are given and limitations of these existing techniques are discussed. Section IV presents some of the work that is needed to get a more accurate description of the plasma.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.1143806
