ISSN:
1089-7623
Source:
AIP Digital Archive
Topics:
Physics
,
Electrical Engineering, Measurement and Control Technology
Notes:
The status and performance of the SORTEC SR facility is described. Emphasis is placed on the reliable operation and the high performance of the SR source and the status of major systems for x-ray lithography.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.1142992