ISSN:
1089-7623
Source:
AIP Digital Archive
Topics:
Physics
,
Electrical Engineering, Measurement and Control Technology
Notes:
A combined machining method of diamond turning and numerically controlled elastic emission machining has been developed for finishing metal mirror surfaces made from Cu and Al alloys. A mirror surface can be polished without any stress by this method. Shape and roughness of the mirror surface examined in different machining methods are compared and discussed. A precisely shaped mirror with a roughness less than 2-nm Rmax was obtained. A copper mirror was installed in a VUV beamline of the Photon Factory. It is confirmed that the metal mirror finished by the present method has good optical characteristics for synchrotron radiation beamlines.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.1140841