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Transport optics for a space-charge broadening ion beam (1988)

Malafsky, Geoffrey P. ; Winograd, Nicholas

[S.l.] : American Institute of Physics (AIP)

Review of Scientific Instruments 59 (1988), S. 1294-1302

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ISSN: 1089-7623

Source: AIP Digital Archive

Topics: Physics , Electrical Engineering, Measurement and Control Technology

Notes: The design and performance of a low-energy ion gun system suitable for surface analysis is described. The ion gun system is capable of delivering up to a 0.72 μA beam of Ar+ ions at a potential of 500 eV into a spot diameter of 1 mm. This performance is accomplished by using ion optics to refocus the space-charge diverging beam along the 44-cm path to the target. The ion optics have been optimized by the use of a new simulation program, chden, which can model a series of lenses and the effects of space-charge forces.

Type of Medium: Electronic Resource

URL: http://dx.doi.org/10.1063/1.1139712

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