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Study of Radiation Damage in Silicon with the Scanning Electron Microscope (1970)

DAVIDSON, S. M.

[s.l.] : Nature Publishing Group

Nature 227 (1970), S. 487-488

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ISSN: 1476-4687

Source: Nature Archives 1869 - 2009

Topics: Biology , Chemistry and Pharmacology , Medicine , Natural Sciences in General , Physics

Notes: [Auszug] In the present work, the scanning electron microscope (SEM) electron channelling pattern method2'3 has been used, in conjunction with anodic stripping, to study the variation of crystalline perfection due to radiation damage with ion dose, depth below the surface and annealing treatment. Some ...

Type of Medium: Electronic Resource

URL: http://dx.doi.org/10.1038/227487a0

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